发明名称 Field effect semiconductor devices and method of making same
摘要 A transistor is formed about a recess in the planar surface of a substrate of silicon. A pair of insulating spacers is provided in the recess, each abutting a respective side of the recess. Gate oxide is formed in the recess between the insulating spacers. A gate electrode is provided having one base overlying the gate oxide and the other base substantially coplanar with the planar surface. A source region extends from one side of the channel underlying the gate oxide to the planar surface. A drain region extends from the other side of the channel underlying the gate oxide to the planar surface.
申请公布号 US4536782(A) 申请公布日期 1985.08.20
申请号 US19830534898 申请日期 1983.09.22
申请人 GENERAL ELECTRIC COMPANY 发明人 BROWN, DALE M.
分类号 H01L21/762;H01L29/08;H01L29/423;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L21/762
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