| 摘要 |
PURPOSE:To obtain a coated hard member having superior wear resistance and toughness by forming a coating of aluminum oxynitride on a substrate with a gaseous mixture consisting of H2, AlCl3, NO and NO2. CONSTITUTION:A substrate of a sintered hard alloy, cermet or ceramics is coated with an inner layer of one or more among AlN, TiN, TiC, TiCO and TiC NO. A coating of aluminum oxynitride is formed on the inner layer as an intermediate layer by bringing a gaseous mixture consisting of H2, AlCl3, NO and NO2 into a reaction. A coating of Al2O3, AlON or AlON-Al2O3 mixture as composite ceramics is then formed as an outer layer. A coated hard member having high toughness, superior wear resistance and heat resistance is obtd. |
