| 摘要 |
PURPOSE:To reduce generation of dust when a flat board is to be fixed to a fixed block by a method wherein the respective pipings of a vacuum and air are provided independently, the respective pipings are made as exclusive use, and a fluid is flowed only in one direction. CONSTITUTION:Grooves 3 on a fixed block 2 are provided the same as usual, while a hole 12 for air and a hole 15 for a vacuum are provided respectively independently. When a movable valve 14' is opened and a movable valve 16' is closed, pure air is supplied to a wafer 1 through a filter 13, and the wafer 1 can be separated. While when the valve 14' is closed and the valve 16' is opened, the wafer 1 is sucked to a fixed chuck 2, and dust adhered to the wafer 1 is conveyed also in the pipe through the piping 15 for a vacuum. |
