发明名称 Fabrication of superconductive tunneling junction resistors and short circuits by ion implantation
摘要 A superconductive junction device for fabricating Josephson integrated circuits is useful for replacing deposited thin-film resistors and for short-circuit device interconnections. Derived by "poisoning" a superconductive electrode or altering the barrier of a tunnel junction, the device displays controllable resistive properties at normal superconducting transition temperatures at substantial savings in the space occupied. Methods of fabricating the device using the selective niobium anodization process and ion implantation process are disclosed. When both upper and lower superconductive electrodes are poisoned, the device has linear properties whose resistance is identical to the normal resistance of unpoisoned junctions. Superconducting short circuits are readily obtained by oxygen ion implantation in thin film niobium electrodes.
申请公布号 US4536781(A) 申请公布日期 1985.08.20
申请号 US19830468604 申请日期 1983.02.22
申请人 SPERRY CORPORATION 发明人 KROGER, HARRY
分类号 H01L39/24;(IPC1-7):H01L39/22;H01L39/12 主分类号 H01L39/24
代理机构 代理人
主权项
地址