| 摘要 |
PURPOSE:To form a hard hydrocarbonaceous film having a low coefft. of kinematic friction when a hydrocarbonaceous protective film is formed on the surface of a magnetic storage medium having a magnetic metallic thin film on the surface of the substrate in a plasma decomposition and polymn. apparatus using the storage medium as one of electrodes, by introducing gas contg. hydrocarbon into the reactor and applying voltage between the electrodes under reduced pressure. CONSTITUTION:The internal pressure of an evacuated reactor is adjusted to 0.001-10Torr, preferably 0.01-10Torr with a gaseous mixture of a gaseous starting material with satd. or unsatd. hydrocarbon such as C2H2, C2H4, C2H6, CH4 or C4H10, and DC or AC voltage of 200-2,000V or high frequency voltage of 200-2,000V and 100kHz-20MHz is applied between electrodes 2, 3. Stable plasma is generated, and a highly cross-linked hydrocarbonaceous protective film is formed on the surface of a magnetic storage medium 1.
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