| 摘要 |
PURPOSE:To separate adjacent bubble transfer paths from each other with a high reproducibility to eliminate malfunctions of magnetic bubbles between transfer paths by using a micro ion beam to vary directly distortion of an ion- implanted distortion layer. CONSTITUTION:The section of a micro ion beam 8 is a perfect circle having a desired diameter, and its intensity has Gaussian distribution. When this beam is scanned along the center lines of mask layers 3 as shown by arrows in a figure (b), distortion in a magnetic garnet film 2 formed by ion implantation is in edge parts of mask layers and is small in center parts between adjacent transfer paths. Next, the ion beam is scanned along center lines of adjacent mask layers 3, and then, distortions between adjacent tranfer paths are synthesized to form ion-implanted transfer paths whose distortion is varied as shown in a figure (c). That is, the value of distortion is large in edge parts of transfer paths, and the distortion layer (the value of distortion) causing malfunctions is reduced in center parts. |
