| 摘要 |
PURPOSE:To produce continuously a product having high quality simply by exchanging an auxiliary member acting as an electrode after film formation by providing attachably and detachably said auxiliary member on the surface side contributing to the electric discharge of the cathode electrode of a CVD device. CONSTITUTION:An auxiliary member 16 acting as an electrode is so provided as to contact with a cathode electrode 1 with a plasma CVD device forming an electrophotographic sensitive body or the like. The member 16 provided to the surface on the side contributing to the electric discharge of the electrode 1 induces a radical reaction of gaseous molecules by collision of the electrons driven out of the member 16 against the gaseous molecules, thus depositing said molecules, on the base body. Since the radicals stick and deposit on the surface of the electrode 1 on the base body 2 side after film formation, the member 16 and the body 2 are exchanged. The desired deposition film is thus continuously formed on the base body 2 by the above-mentioned device. |
