| 摘要 |
PURPOSE:To improve movement and stop accuracy of truck and easily realize maintenance and repair of transfer mechanism by providing a driver of transfer mechanism at the one end or both ends of substrate transfer chamber. CONSTITUTION:A transfer chamber is composed of a transfer chamber 18 and a drive chamber 19. Both ends of rail 11 extend up to the drive chamber 19 and are provided with a sprocket 15 for driving the chain or metal belt 13. The tension sprocket 20 is pushed by a spring 21 in order to give adequate tension to the belt 13 and preventing deflection of it. The truck 12 and belt are coupled in rigid, stop accuracy of truck 12 driven by rotation of sprocket 15 is remarkably improved and automatic send and receive of substrate can be realized easily. Since the sprocket 15 and tension mechanism are exposed by removing the drive chamber 19, it is no longer necessary to deassemble the transfer path in the maintenance and working efficiency of apparatus can be improved distinctively. |
