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发明名称
A PROCESS FOR THE PRODUCTION OF SILICON NITRIDE
摘要
申请公布号
EP0122897(A3)
申请公布日期
1985.08.14
申请号
EP19840850097
申请日期
1984.03.26
申请人
KEMANORD AB
发明人
JOHANNSSON, THOMAS
分类号
C01B21/068;(IPC1-7):C01B21/068
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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