发明名称 EXPOSING DEVICE
摘要 PURPOSE:To make a printing device compact while utilizing exposing light effectively by means of providing multiple exposing bases with common exposing light source. CONSTITUTION:The light from a common exposing light source 1 is projected into exposing bases 6-9 respectively through plane mirrors 2-5. The plane mirrors 2-5 excluding No.5 are selectively shifted by a device 10 to project the light in any specified base. A light source 1 utilizing a laser with excellent light flux directivity can select oscillating status to save any exposing energy loss. The exposing energy loss may be entirely eliminated if a pulse-oscillating excimer laser is utilized to control the pulse oscillation corresponding to the timing for exposure of each base. The excimer laser with high output can shorten the exposure time. In such a constitution, a printing device with compact construction utilizing exposing light effectively may be produced without fail.
申请公布号 JPS60154527(A) 申请公布日期 1985.08.14
申请号 JP19840010544 申请日期 1984.01.24
申请人 CANON KK 发明人 TORIGOE MAKOTO;KOUNO MICHIO;SUZUKI AKIYOSHI
分类号 H01L21/30;G03F7/20;H01L21/027 主分类号 H01L21/30
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