Photolithographic device and magnetic surface memories produced thereby

摘要

In order to generate large-area, periodic patterns, the substrates (9) covered with a photosensitive layer are brought into the interference field (8) which is produced by four plane, mutually inclined waves. The plane waves are produced by splitting a laser beam (1) in a holographic lattice grating (2) which directs the total incident light energy into the four first diffraction orders. In order to collimate the diffraction beam, use is preferably made of large-area mirror optical systems by means of which the angle of inclination of the plane waves with respect to one another can be varied. It is possible to produce with the aid of the photolithographic device magnetic surface memories having vertical, insular magnetisation domains, or other surfaces which are covered with closely packed, vertical needles. <IMAGE>