SURFACE ACOUSTIC WAVE ELEMENT

摘要

PURPOSE:To improve the accuracy in forming an electrode by coating a metallic conductor electrode layer and an insulation oxide layer of the same metal to the surface of a substrate having a piezoelectric effect and imbedding the electrode layer to the oxide layer so as to attain ease of manufacture of the imbedded electrode structure. CONSTITUTION:A metallic layer 8 is formed by vapor-depositing Al or Ti having a high conductivity to the entire surface of the substrate 1 having the piezoelectric effect. Then a resist film 9 is formed selectively by coating, and a part not covered by the film 9 is selected so as to form the metallic electrode layer 8a and the oxide layer 8b made of the same metal as that of the electrode layer 8a. Then the electrode layer 8a is formed at the same time while it is imbedded to the oxide layer 8b so as to attain ease of manufacture of the surface acoustic wave element of the electrode structure thereby improving the accuracy in forming the electrodes.