| 摘要 |
PURPOSE:To contrive the reduction in electrode diameter, increase in integration of the titled device, and decrease in cost by a method wherein Ag or Ag alloy is used for a bonding metallic fine wire. CONSTITUTION:A forming device for a ball-up of an Ag bonding wire is provided with a nitrogen gas inflow pipe 2 in the opposite electrode 1 of an electric torch by penetration toward a discharge electrode 3, and nitrogen gas is supplied so a to blow up the pure Ag bonding metallic fine wire 5 contained in a capillary 4 from below. This manner enables the tip of the metallic fine wire 5 to be wrapped in a nitrogen gas atmosphere of oxygen concentration 100ppm or less without obstructing a flow of charge particles caused by discharge. This forming device can be easily installed to a generally used high-speed automatic bonding device, with which device the ball-up working of the pure Ag fine wire can be incorporated in the industrial production process. Of cource, another inert gas can be used in place of nitrogen. |
