发明名称 SENSE OF CONTACT FORCE SENSOR
摘要 PURPOSE:To contrive the improvement in reliability by marked reduction of the number of cross-over by a method wherein strain gauges are formed on both surfaces front and bask so as to detect two components of three components of force at one side surface and the other component at the opposite surface, and are then made to share the components of force detected on front and back surfaces. CONSTITUTION:A vertical component force Fz is detected by diffused type strain gauges 101-104 formed on the front, and two horizontal component forces Fx and Fy are detected by diffused type strain gauges 111-114 and 121-124 formed on the back. Z3 and Z4 on the front are power source terminals, and V and V on the back are also power source terminals. Since two components of three components of force are detected on one surface, and the other one component is detected on the opposite surface in such a manner, the number of cross-over of wirings 141-145 markedly reduces to three on the front and five on the back, totalling to eight; resulting in the reduction in number of cross-over about to 1/4 as compared with the conventional technique. Therefore, the cross-over in the lower part giving influences on reliability can be eliminated.
申请公布号 JPS60153175(A) 申请公布日期 1985.08.12
申请号 JP19840008786 申请日期 1984.01.20
申请人 FUJI DENKI SOUGOU KENKYUSHO:KK 发明人 TAKAHAMA TEIZOU
分类号 G01L5/16;H01L29/84 主分类号 G01L5/16
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