| 摘要 |
PURPOSE:To exchange a laser medium gas in a short time by previously evacuating a vacuum vessel by a vacuum pump and exchanging the laser medium gas. CONSTITUTION:A vacuum pump 2 with a solenoid valve 3 is connected to a gas laser oscillator 1. A vacuum vessel 12 with a second solenoid valve 8 is connected between the solenoid valve 3 and the pump 2. The pump 2 is turned ON and the solenoid valve 8 is opened, and the inside of the vessel 12 is drawn to a high vacuum. When opening the solenoid valve 3, a laser medium gas in the oscillator 1 flows into the vessel 12. The solenoid valve 8 is closed, the pump 2 is operated and the inside of the oscillator 1 is drawn to the fixed degree of vacuum, and the solenoide valve 3 is closed. The solenoid valve 8 is opened, and the laser medium gas in the vessel 12 is discharged. A solenoid valve 5 is opened, and a novel laser medium gas is encapsulated into the oscillator 1 from a bomb 4. Accordingly, the laser medium gas is exchanged in a short time. |
