| 摘要 |
PURPOSE:To improve a working atmosphere and to prevent it for molded products to be contaminated, and also, to prevent it for the humidity resistance thereof to lower by a method wherein liquid easy to vaporize is sprayed on flashes being accompanied with the molded products and the flashes are removed. CONSTITUTION:A pair of guide rails are laid in a sealed vessel 6. The guide rails 7 are constituted in such a way as to support a lead frame 3, whereon a semiconductor device 1 can be freely slided in a condition that the lead frame 3 has been bridged over between the guide rails 7, and the semiconductor device 1 is conveyed. Plural nozzles 8 are arranged upward and downward between the guide rails 7 in such a way as to oppose to flashes being accompanied with a package 2 and each nozzle 8 is connected to a feeding path 10, which feeds with a fluorochlorine substituent product 9 of hydrocarbon which is liquid easy to vaporize. The feeding path 10 is connected to a tank 12 through a pump 11. A recovery port 13 is openly provided on the ceiling wall of the vessel 6 and a recovery path 14 is connected to the tank 12 through a compressor 15 and a condensor 16. |
