| 摘要 |
PURPOSE:To remove overlapping sections on the connection of electrodes effectively by forming power generating regions having positive and negative polarity and mutually connecting upper electrodes in the positive and negative power generating regions or lower electrodes in the regions. CONSTITUTION:A transparent conductive film is formed on a glass substrate 1 by using a metallic mask. P type amorphous Si 3 is shaped through a glow discharge decomposition method for monosilane by employing a metallic mask. The metallic mask is rotated in a 180 deg. arc centering around an axis vertical to a mask surface, thus forming N type amorphous Si 4. Only monosilane is flowed, and an I type layer 7 is shaped. A P type layer 3 is formed to the upper section of the N type layer 4 and an N type layer 4' to the upper section of the P type layer 3 through the same method as said P and N type layers are shaped. An aluminum electrode 8 is formed through a vacuum evaporation method in which a metallic mask is fitted. |
