| 摘要 |
PURPOSE:To reduce a wiring space on a supporter by constituting the supporter by a single crystal semiconductor and integrating a wiring and a control circuit processing an output signal from a resistance element bridge to the supporter. CONSTITUTION:Both a pressure-receiving structure 1 and a supporter 2 consist of silicon single crystals, the pressure-receiving structure 1 takes a ring shape and the upper side of the structure 1 has a pressure-receiving surface 11, and resistance element regions 3 having a conduction type different from the conduction type of the structure are formed to surfaces 12 vertical to the pressure-receiving surface by diffusion. Wirings 4 and an electronic circuit 5 for processing output signals from a resistance element bridge are formed to a support surface fixed to the pressure-receiving structure 1 of the supporter 2. The electronic circuit 5 is connected to terminals 7 for wirings on the pressure-receiving structure 1 through the connecting wirings 4 and bonding wires 6. |
