| 摘要 |
PURPOSE:To obtain a thin film magnetic head having good recording and reproducing characteristics by forming the first magnetic thin film, which is formed on a flat part, with a crystalline magnetic thin film and forming the second magnetic thin film, which is formed after an insulator forming process, with an amorphous magnetic thin film. CONSTITUTION:A ''Permalloy'' 1 is formed with a prescribed thickness as the first magnetic thin film on a nonmagnetic substrate 3 by sputtering and is patterned to a prescribed shape. An alumina film to be a magnetic gap is formed with 0.5mum thickness, and a spiral plane winding 5 is vapor-deposited and is patterned. A magnetic thin film 2 consisting essentially of Co, Nb, and Zr is formed with a prescribed thickness as the second magnetic thin film by sputtering and is patterned to a prescribed shape. This film consisting essentially of Co, Nb, and Zr is known as an amorphous magnetic film. Thus, the thin film magnetic head having good recording and reproducing characteristics where a magnetic circuit is constituted of magnetic thin films having no degrated parts of magnetic characteristics is obtained. |
