| 摘要 |
PURPOSE:To make an initial position adjustment by utilizing an optical head by measuring the relative position relation between the detection head and an object of inspection, and processing data on the measurement and moving either or both of the detection head and object of inspection. CONSTITUTION:When the initial position is adjusted, two substrates as objects A of inspection is placed on a table and an L-shaped pattern is swept in an X or Y direction. Image data obtained by the detection head through an image pickup lens L is sent from an image sensor 21 to a decision logical circuit 23 consisting principally of a computer through an image processing circuit 22 to perform necessary processing. When the initial position is set, the output of the decision logical circuit 23 is used to control an angle setting motor Mtheta for the table, a motor M1 which moves forth and back the table, and motors M2 and M3 which moves detection heads 15 and 16. |
