| 摘要 |
PURPOSE:To apply a signal sequence to an IC1 and an IC2 at any time and continuously test them by entering coincident operation individually if there is a coincident pattern, and storing a test pattern in memory during the coincident operation. CONSTITUTION:Test patterns which are already stored in pattern auxiliary memory 42 are supplied in the order of loading for the test of the IC1 to be measured after the coincidence of the IC2 to be measured is obtained. Further, when there is a coincident pattern, the coincident operation is started individually and the test patterns are stored in the auxiliary memory during the coincident operation. Thus, the IC1 and IC2 to be measured are tested by always supplying a signal sequence. Further, the auxiliary memory, pattern controller, etc., are added corresponding to the number of ICS which need to be measured at the same time, so that an optional number of ICs are tested simultaneously. |
