| 摘要 |
PURPOSE:To make the valve inexpensively and improve the durability by a method wherein a thin diaphragm is provided between a fixed piece as well as an outer frame and a movable piece to intercept contact between control fluid and the fixed piece. CONSTITUTION:The lower surfaces of the fixed piece 70 and the outer frame 71 are on the same plane and the thin diaphragm 75 is provided between the movable piece 67 and the fixed piece 70 as well as the outer frame 71 so as to cover the upper surface of a main body 61. The lower end of the outer frame 71 does not contact with the fluid by the thin diaphragm, therefore, the fixed piece and the outer frame can be made of soft iron having good magnetic characteristics. In case the second thin diaphragm of nylon, ultra-high-molecular-weight polyethylene or the like, being superposed on above-described thin diaphragm 75, is used between the thin diaphragm 75 and the fixed piece 70 as well as the outer frame 71, shock due to suck-up of the movable piece 67 may be absorbed and a long life may be achieved. |
