发明名称 WIREBONDING DEVICE
摘要 PURPOSE:To make high speed automation feasible while improving the workability of a bonding device by a method wherein a bonding head is provided on an X-Y table performing quadratic movement in the horizontal direction while a camera is fixed on another X-Y table performing another quadratic movement in the horizontal direction different from the former X-Y table. CONSTITUTION:A 7 segment liquid crystal displayer is loaded on a bonding position as a bonding sample 14. An X-Y table 12 for fixing a camera is operated corresponding to the coordinates of the reference position memorized by a recognizer 15 making a camera 11 pick up the first pad 3A to recognize and memorize the actual positions of the pad 3A and a lead 5A. Then another X-Y table 9 is operated corresponding to the memorized coordinates to make a bonding tool 13 wirebond the pad 3A and the lead 5A with each other. Simultaneously with this wire-bonding operation, the X-Y table 12 for fixing a camera is operated corresponding to the memorized reference coordinates making the camera pick up the second pad 3B to recognize and memorize the actual positions of the pad 3B and another lead 5B.
申请公布号 JPS60150638(A) 申请公布日期 1985.08.08
申请号 JP19840005773 申请日期 1984.01.18
申请人 KAIJIYOU DENKI KK 发明人 MIYOSHI HIDEAKI
分类号 H01L21/60 主分类号 H01L21/60
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