| 摘要 |
PURPOSE:To enable to detect displacement amount and displacement angle accurately by a method wherein approximate and relative displacement angle in the direction of IC element toward the referential direction of a recognizing camera is detected and after minimizing the relative displacement angle by means of turning the camera and the element, the location and/or direction of the element toward the camera are detected again. CONSTITUTION:It is assumed that a displacement angle is equal to DELTAtheta1 by a recognition due to a pattern matching in the window regions 6, 7. Next the relative angle is minimized by means of turning a theta-table by approximate and relative displacement angle theta1 while almost equalizing the direction of IC element with that of camera grid and then the slip amount DELTAX1', DELTAY1', DELTAX2', DELTAY2' are calculated to decide the slip angle DELTAtheta1' by another recognition due to another pattern matching utilizing a camera. The error in the detected values of DELTAX1', DELTAY1', DELTAX2', DELTAY2' may be minimized since the relative displacement angle DELTAtheta' between the direction of IC element and that of reference pattern is extremely small in the second time pattern matching. |
