| 发明名称 |
Tailoring of novolak/diazoquinone positive resists by acylation. |
| 摘要 |
<p>A modification of the solubility of novolak-diazoquinone positive resists by acylation of phenolic hydroxyl groups is described. </p> |
| 申请公布号 |
EP0150315(A2) |
申请公布日期 |
1985.08.07 |
| 申请号 |
EP19840114275 |
申请日期 |
1984.11.27 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
PERREAULT, STANLEY EUGENE;WOOD, ROBERT LAVIN |
| 分类号 |
G03C1/72;C08G8/00;C08G8/32;G03C1/52;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/08 |
主分类号 |
G03C1/72 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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