| 摘要 |
PURPOSE:To enable stable continuous output to be obtained always without the replenishment of He gas by a method wherein an He gas separating device is provided at a gas exhaust port, and the He gas from this device is returned into a resonator. CONSTITUTION:The He gas separating device 8 is inserted between the exhaust side of a vacuum pump 3 and a constant pressure valve in the titled device. Only the He gas is exhausted out of an exhaust port A of this device 8, and gasses except the He gas are exhausted out of an exhaust port B. When the pressure inside the exhaust port B becomes over a fixed pressure, only the gasses except the He gas are exhausted out of the constant pressure valve 4. Then, the He gas from the exhaust port A is returned into the resonator of the CO2 laser device through the constant pressure valve. |
