| 摘要 |
An electrode (13) has a nonconductive substrate (15) and a conductive layer (16) having a first plurality of holes (18) applied to the substrate which is then coated with a dielectric layer (20) wherein the dielectric layer has a relatively low resistivity (e.g. 1011 ohm cm). A second and third plurality of holes (700,710), concentric with but of smaller diameter than the first plurality of holes (18), are formed through the dielectric layer (20) and the nonconductive substrate (15), thereby providing a recess spacing (19) between the conductive layer holes (18) and the holes (700,710). In one embodiment of an electrostatic transducer (11), two electrodes (13) are spaced from a diaphragm (12) positioned therebetween. An electrostatic transducer (40) having multiple diaphragms (12,21) is made by incorporating two types of electrodes (13,28). One type of electrode (13) has one side of a nonconductive substrate (15) coated with a conductor (16) and a dielectric layer (20). The other type of electrode (28) has two sides of a nonconductive substrate (17) coated first with a conductive layer (60,61) and then with a dielectric layer (100,101).
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