| 摘要 |
PURPOSE:To prevent striae from occurring on the surface of a resist film when a predetermined thickness of the resist is applied on the surface of a planar material while rotating the material at a predetermined speed, by stopping the rotation before the resist hardens. CONSTITUTION:A planar material 1 to be applied with resist is located on a spin head 2 for rotating the material 1, and fixed thereto by vacuum chucking or the like. Resist A is dropped from a nozzle 3 onto the surface of the stationary material 1. The head 2 is then driven to rotate the material at a low rotational speed of about 1,000rpm such that the resist A is diffused all over the surface. After that, the rotational speed is increased to about 5,000rpm. The resist is applied in a thickness slightly larger than the predetermined final thickness, and the rotation is stopped before the resist hardens so that the resist is allowed to harden in a stationary state. According to this method, no difference is produced in movement of the resist A between a part where it has hardened first and a part where it has no hardened yet on the surface of the material to be applied with 1. Therefore, striae can be prevented from occurring in the resist. |
