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发明名称
PIEZOELECTRIC X-Y POSITIONER
摘要
申请公布号
JPS60148040(A)
申请公布日期
1985.08.05
申请号
JP19840219407
申请日期
1984.10.20
申请人
INTERN BUSINESS MACHINES CORP
发明人
YOHANE JIERORUGU BETSUDONORUZU;RARUFU REROI HORISU JIYUNIA;MAACHIN RANTSU;BUORUFUGANKU DEIITERU POORU;SERIA ERIZABESU YAAKUUSUKURANTON
分类号
H01J37/20;B23Q1/36;G02B21/00;G02B21/26;G03F7/20;G12B1/00;H01L41/09
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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