发明名称 PRODUCTION DEVICE FOR SEMICONDUCTOR
摘要 PURPOSE:To reduce the number of positioning processes for taping by bringing a base holder to a rotatable state in a tape pasting device executing taping on a semiconductor chip. CONSTITUTION:In a tape pasting device executing taping on a semiconductor chip, a base holder 4 to which a base 1 for a package on which the semiconductor chip 2 is loaded is fitted can be turned around the center O of the chip 2. On a taping, X-Y stages are scanned, the block 3a of a memory cell on the left side is recognized and the base holder 4 is positioned, and a tape 5 sucked and held to an arm 6 is lowered and bonded with the block 3a. The holder 4 is turned and a cell block 3b on the right side is carried up to the position of the block 3a on the left side completely positioned, and taping is executed in the same manner as mentioned above.
申请公布号 JPS60148152(A) 申请公布日期 1985.08.05
申请号 JP19840003871 申请日期 1984.01.12
申请人 FUJITSU KK 发明人 GOTOU JIYUNICHI
分类号 H01L23/29;H01L23/31 主分类号 H01L23/29
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