| 摘要 |
PURPOSE:To equalize the velocity profile of a medium gas flowing in a laser pipe, and to increase an output by disposing a slit member with a plurality of radial slit holes inclined to a center line in front of the laser pipe on the gas inflow side. CONSTITUTION:A gas inflow pipe 7 and a gas outflow pipe 8 are mounted to a laser pipe 1, and a blower for circulating a gas is installed to one part of a piping for circulating the gas. A slit member 10 is fitted between the inflow pipe 7 and a section immediately before a glow discharge section for the laser pipe 1. A plurality of slit holes 11 inclined at an angle of 20 deg. or lower to the center line of a laser pipe axis are formed radially to a circumferential side surface in the slit member 10, and a velocity profile in the pipe 1 of the medium gas is equalized. |
