| 摘要 |
PURPOSE:To exhaust a gaseous mixture with a desired concn., by separately providing rotary valve bodies in a primary side and passing both gases through separate flowlines until mixing both gases in a mixing chamber while certainly shielding both gases during the passage of both gases by a seal member. CONSTITUTION:When a control knob 6 is subjected to angular displacement in a predetermined amount, the angular displacement is transmitted to gears 102, 103 through a gear 101 and a rotary valve bodies 104, 105 are rotated. By this mechanism, the predetermined number of valve ports 109, 110 are closed and the sum total of unclosed valve ports 109, 110 are made always constant. Therefore, the flow amount of a gaseous mixture becomes always constant. Both gases pass separate flowlines until mixed in a mixing chamber 118 and certainly shielded during this time by a seal member 120 and the gaseous mixture with an accurate concn. is obtained. |
