发明名称 ROTARY FINELY MOVING MECHANISM
摘要 PURPOSE:To prevent a rotary disc form slipping and to prevent the rotating speed and the rotary torque from decreasing by mounting a reverse rotation preventing mechanism in a conventional rotary finely moving mechanism, and switching the operating direction of the mechanism by the rotating direction. CONSTITUTION:A supporting tool 51 secured onto a base 5 is formed in an L- shaped structure, and one arm is formed in a structure projected on rotary discs 2, 3. A rotational shaft 52 is provided at the end of the arm, and, for example, supported by a roller ball bearing or the like. A follower 53 is secured to the rotational shaft to rotate around the shaft as a center. The follower is rotatably supported at the position displaced from the center of itself, and part of the follower is contacted with the discs 2, 3. For exmaple, when the disc 3 slips in a direction of an arrow, the follower tends to rotate by the frictional force between the disc 3 and the follower 53. The frictional force produced by this force is acted to prevent the slip.
申请公布号 JPS60145613(A) 申请公布日期 1985.08.01
申请号 JP19840001272 申请日期 1984.01.10
申请人 TOSHIBA KK 发明人 MATSUMOTO YUUJI;TOUJIYOU TOORU;SUGIHARA KAZUSUMI
分类号 H01L21/027;H01L21/30;H01L21/67;H01L21/68 主分类号 H01L21/027
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