| 摘要 |
<p>A microminiature switch (104) for digitizing different valued external conditions, such as pressure, temperature or acceleration. The switch (104) includes a silicon wafer (108) having a deflectable, reduced-thickness membrane (106) adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane (106) from its relaxed position to more strained positions establishes electrical contact between a conductive expanse (130) connected to a common terminal and first one and then progressively more switch state terminals (118) in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch. This construction satisfies the need for reliable, low cost switching devices in microminiature sensing system.</p> |
