| 摘要 |
PURPOSE:To increase sensitivity and to reduce smears by providing a convex lens made of material having refractive index not smaller than an insulating film on the insulating film just above a photoelectric converting section. CONSTITUTION:Polysilicon is grown by a low-pressure CVD process using SiH4 gas to form a transfer gate 5 and an overflow control gate 6, and SiO2 is grown by a normal-pressure CVD process using SiH4, O2 gas to form an interlayer insulating film 2. Then, aluminium of about 0.5mum is vapor-deposited by sputtering to form aluminium 4 for shielding the light, and SiO2 is grown by the normal pressure CVD provess using SiH4, O2 to form a passivation film 3. A convex lens 13 on the passivation film is formed of polystyrene having refractive index not smaller than SiO2. Thus, a convex lens is provided on the passivation film 3 just above a photodiode 1 using material having refractive index not smaller than the inter-layer insulating film 2.
|
