Apparatus for the automatic performance of analytical processes

摘要

Apparatus for the automatic performance of analytical processes according to the variance analysis method in developing and fabricating semiconductor components, comprising a reading device for detecting wafer numbers, a device for rearranging semiconductor wafers, a minicomputer for controlling the rearrangement device and a data processing system for storing data required for the evaluation of the analytical process. The reading device is datalinked to the minicomputer. It detects the number of each semiconductor wafer and transmits this to the minicomputer. The rearranging device is equipped either with appliances for mutual displacement of containers containing the semiconductor wafers to be rearranged as well as with a push rod appliance, or else with robot-type gripping appliances. Said gripping appliances may also be combined with appliances for the mutual displacement of the containers. The device is controlled by the minicomputer and is able to rearrange semiconductor wafers individually. In the process, it achieves a relative arrangement of the semiconductor wafers which is different after rearrangement from a corresponding arrangement prior to rearrangement. The apparatus according to the invention makes it possible to automate the analytical process.