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发明名称
VERFAHREN ZUR HERSTELLUNG VON THERMISCH BESTAENDIGEN POLYCHINOXALIN-BESCHICHTETEN SILIZIUMSUBSTRATEN
摘要
申请公布号
DD225548(A1)
申请公布日期
1985.07.31
申请号
DD19830257649
申请日期
1983.12.08
申请人
ADW D. DDR,DD
发明人
FRIEDRICH,JOERG,DD;FALK,BERND,DD;RUTSCH,BETTINA,DD;RAUBACH,HEINZ,DD
分类号
C23C14/12;H01L21/312;(IPC1-7):H01L21/312
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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