SOLID STATE DEVICES PRODUCED BY PLASMA DEVELOPING OF RESISTS,申请号GB19820011400-传众专利搜索

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发明名称	SOLID STATE DEVICES PRODUCED BY PLASMA DEVELOPING OF RESISTS
摘要
申请公布号	GB2097143(B)	申请公布日期	1985.07.31
申请号	GB19820011400	申请日期	1982.04.20
申请人	WE	发明人
分类号	C07F7/08;C07F7/18;C08F2/48;C23F1/00;C23F4/00;G03F7/038;G03F7/075;G03F7/36;H01L21/027;(IPC1-7):G03C1/71	主分类号	C07F7/08
代理机构		代理人
主权项
地址

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