| 摘要 |
PURPOSE:To enable efficient condensation of slight sample light and enable simultaneous combination use of a mirror and a reflecting objective mirror under the conditions of the same absorption current quantity as the absorption current quantity of an X-ray microanalyzer by disposing said mirror and reflecting objective mirror between a sample and an electron gun. CONSTITUTION:The electron ray 26 emitted from an electron gun 22 passes through the fine hole of a mirror 23 and the holes 27a and 27b of a concave mirror 24a and a convex mirror 24b so as to fall on a sample 28 on a sample base 25. The cathode luminescence emitted by said light is collected by a reflecting objective mirror 24 and heads toward the mirror 23 at the observable and analyzable intensity under the conditions of the same absroption current quantity as the absorption current quantity of the analysis by an X-ray microanalyzer. The luminescence is changed in the course by said mirror so as to arrive at a mirror 34 and after the course is further changed by said mirror, the luminescence is condensed by a lens 39 and is displayed as a sharp image, etc. on a display device 38 via a spectroscope 35, a photoelectron multiplier 36 and a processing circuit 37. |
