| 摘要 |
PURPOSE:To enhance characteristics by forming a photoreceptor composed of each amorphous layer made of Si, Si-Ge, Si-N, contg. Ge in the second layer in a concn. distribution nonuniform in the layer thickness direction, and C in one of the first layer and the second layer. CONSTITUTION:A photoreceptor 102 formed on a substrate 101 is composed, upward from the substrate 101, of the first layer 103 made of a-Si (H, X), a layer 104 made of a-SiGe (H, X), a layer 105 made of a-SiN (H, X), and one of the layers 103 and 104 contains C and a conductivity governor, such as p type or n type impurity. The layer 103 or 104 contains F, Cl, Br, or I as halogen X, and the layer 104 contains Ge in a nonuniform distribution in the layer thickness direction. |
