| 摘要 |
PURPOSE:To utilize the inner diameter of a heater effectively eliminating any useless space by means of adhering a carbon made cylindrical heater closely to a reaction tube. CONSTITUTION:A pyrolytic boron nitride reaction tube 11 is formed into cylindrical shape. The reaction tube 11 is formed into one body with a carbon heater 12 adhering closely thereto. During growing process, electrodes 14, 15 are supplied with current to heat the heater 12 for heating a growing boat 13 in the reaction tube 11 up to specified temperature. Through these procedures, the inner diameter of heater 12 may be utilized effectively eliminating any useless space. |
