| 摘要 |
PURPOSE:To move an object to be heat-treated smoothly without vibration by rotating the feed screw shaft of a feed gear directly with a belt. CONSTITUTION:In the case of moving a boat 52, the input side of a reduction gear 32 is driven by the rotation of a feed motor 30 through a timing belt 34, the output side is reduced its rotation through a harmonic mechanism and a feed screw shaft 23a is rotated with a timing belt 37. In this case, the feed screw shaft 23a is a long size and vibrates by the rotation of a nut 23b but is driven by a belt transmission and rotates smoothly without vibration since the vibration of the shaft end is not constrained like a coupling bond. Accordingly, the unnecessary vibration of a wafer W is prevented. |
