| 摘要 |
A carriage type, bubble jet ink printing system having improved bubble generating resistors that operate more efficiently and consume lower power, without sacrificing operating lifetimes. The resistor material is heavily doped polycrystalline silicon which can be formed on the same process lines with those for integrated circuits to reduce equipment costs and achieve higher yields. Glass mesas thermally isolate the active portion of the resistor from the silicon supporting substrate and from the electrode connecting points, so that the electrode connection points are maintained relatively cool during operation. A thermally grown dielectric layer permits a thinner electrical isolation layer between the resistor and its protective, ink interfacing tantalum layer, thus increasing the thermal energy transfer to the ink.
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