| 摘要 |
PURPOSE:To enable manufacture of a high quality electromagnetic conversion element in a good yield by coating a thin film of ferromagnetic material on an insulation film heating a substrate at a specific temperature. CONSTITUTION:On the surface which is formed flatly like the surface of a mirror of a semiconductive non-magnetic substrate 10, an insulation film 11 of such as SiO2 or Si3N4 is formed, then the substrate 10 is heated at a temperature of 150-300 deg.C and the insulation film 11 is coated with a film 12 of ferromagnetic material, e.g., such as an alloy of 80Ni-20Co. The film 12 of ferromagnetic material formed in this way is photoetched and a film 12p of a polygonal pattern for a current circuit is formed and then through required processes, an electromagnetic conversion element is formed. |
