| 摘要 |
PURPOSE:To easily and surely judge the ending point of pattern etching, by performing the etching in such a way that a pair of dummy electrode patterns which have almost the same interval between them as coil conductor patterns and are separated from each other are kept remaining, to a conductor layer. CONSTITUTION:A mask is previously formed near a coil conductor 4 in such a way that a pair of dummy electrode patterns 5a and 5b which have almost the same interval (D) between them as dimensions (d) between each line of the coil conductor 4 and are separated from each other, are kept remaining even after etching. Since a thin-film magnetic head is manufactured by performing the etching so that the dummy electrode patterns 5a and 5b are kept remaining and judging the ending point of the pattern etching of the coil conductor 4 which is a minute pattern from the presence absence of electrical continuity between the patterns 5a and 5b, the end point of the etching becomes clear and accurate and, therefore, the end point can be discriminated easily and surely. |
