| 摘要 |
PURPOSE:To improve the adhesion to a recording layer and to improve the compactness and oxidation resistance of a protective layer itself by incorporating rare earth elements and transition metals as an element for constituting a base body and carbon or nitrogen as a stabilizing element into the protective layer. CONSTITUTION:The inside of a vessel 1 is evacuated to a vacuum and thereafter a specified flow rate of gaseous Ar is introduced via 5 into the vessel 1 to maintain the gaseous pressure therein under a prescribed pressure. An electric power source 4 is then thrown to form a recording film consisting of a Tb-Fe alloy having a prescribed thickness on a substrate 3 by RF electric power. The power source 4 is once turned off and a specified flow rate of gaseous CH4 is introduced into the vessel 1. The mixing ratio of the gaseous CH4 with the gaseous Ar is made 20% in this stage and the pressure of the gaseous mixture is maintained under the prescribed pressure by adjusting the evacuating system. The RF power is again thrown to form a protective layer consisting of Tb, Fe and C having a prescribed thickness on the above-described recording film. In the constitution figure of the optothermomagnetic recording medium manufacture by the above-mentioned method, 8 is the glass substrate, 9 is the recording film consisting of the Tb-Fe alloy and 10 is the protective film consisting of Tb, Fe and C. |
