| 摘要 |
PURPOSE:To obtain the picture elements of an SIT light detector or an SIT image sensor in which a gate structure as a light accepting part comprises light accepting sensitivity corresponding to the spectral sensitivity property by specifying an area, a diffusion depth, in the gate structure of the SIT. CONSTITUTION:A light detector is composed by using an n<+> buried layer as a drain or source region. Then for three wavelengths, blue of the specific wavelength as lambda1, green as lambda2 and red as lambda3, the area A(lambdai) of a p<+> region which composes a gate part for accepting the specific wavelength lambdai (wherein i=1, 2 and 3) selectively is predetermined as A tot, eeta(lambdai)/[(1-R(lambdai)] wherein e is 2.718, (lambdai) is a quantum efficiency required for the wavelength lambdai, R(lambdai) is a reflection coefficient for the wavelength lambdai. A tot=A(lambda1)+A(lambda2)+A(lambda3). Furthermore, the picture elements for accepting the above described three wavelengths are arranged in honeycomb form. Then, the diffusion depths of gates are selected to be 0.2mum, 0.5mum and 1.3mum selectively and the widths of the depletion layers among the n buried source regions are selected to be 0.4mum, 0.9mum and 2.3mum so as to make the light accepting sensitivity attains a peak for each wavelength.
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