发明名称 ILLUMINATION OPTICAL DEVICE
摘要 PURPOSE:To make the state of the wavelength selective means such as the filter into a thermally stationary state and to prevent the characteristics of transmittivity of the filter from changing by a method wherein the selective means is disposed on the side of the light source of the shutter. CONSTITUTION:The wavelength selective means such as a filter 5 is disposed before a shutter 6. The filter 5 is irradiated with the cool light from a cold mirror 3. Accordingly, when the characteristics of luminous intensity of a light source 1 is regarded as an almost constant, the amount of incident light of the cool light into the filter 5 is always constant, and subsequently to the warming-up of the illumination optical device, the state of the filter 5 becomes a stationary state on its amount of absorption light. By this way, the characteristics of transmittivity of the filter 5 can be prevented from changing.
申请公布号 JPS61180435(A) 申请公布日期 1986.08.13
申请号 JP19850020157 申请日期 1985.02.06
申请人 CANON INC 发明人 TAKAHASHI KAZUHIRO;SUZUKI AKIYOSHI
分类号 G03F7/20;H01L21/027;H01L21/30 主分类号 G03F7/20
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