发明名称 MEASURING DEVICE OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To execute a measurement with high accuracy, and also to obtain a high workability by correcting an analog signal and a timing signal with respect to optical intensity and an angle from a linear image sensor. CONSTITUTION:A laser diode 1 is inserted and fixed to a 90 deg. rotation driving part 3 provided with a guide socket, and by a current from a power source 2, a normal output is sent out of the diode 1. Optical axes of the diode 1 and a one- dimensional image sensor 6 are made to conform with high accuracy. The light which is made incident on the sensor 6 through an optical filter 5 is supplied to a sensor driving circuit 7, converted to a signal, and also a timing signal to an angle is generated. Each signal is supplied to an optical intensity/angle correcting device 8, and its output is displayed as a scale limit and a long view image by a direct viewing device 9.
申请公布号 JPS60142276(A) 申请公布日期 1985.07.27
申请号 JP19830246754 申请日期 1983.12.29
申请人 NIPPON DENKI KK 发明人 TADA TOSHIO
分类号 G01R31/26;G01M11/00;G01M11/02 主分类号 G01R31/26
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