| 摘要 |
PURPOSE:To enable to replace at least a part of a plurality of probe groups as well as to simplify the replacement work of the probe groups by a method wherein a probe unit is pinched between two supporting plates in such a manner that its upper and the lower terminal parts are engaged with the stepped part of a stepped hole, and a coupling member is interposed between said supporting plates. CONSTITUTION:When the change of the probe arrangement of a probe unit 4 is required, the upper supporting plate 1 and the lower supporting plate 2 are separated by removing the coupling members 3 located at the four corners of supporting plates 1 and 2. The probe unit 4 to be changed is replaced by new probe unit 4 having other probe arrangement, and the supporting plates 1 and 2 are coupled in one body using a coupling member 3 by conducting an operation reverse to the above-mentioned procedure. Also, as each probe unit 4 is fixed in a pinched manner between the supporting plates 1 and 2 and it can be mounted, dismounted and replaced simultaneously by releasing the coupling of the supporting plates 1 and 2, a replacement work can be performed easily when compared with the case where the probe unit 4 is detachably mounted on the supporting plates 1 and 2 using a separate fixing device for each probe unit. |
